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Handbook of silicon based MEMS : materials & technologies /
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...
| Clasificación: | Libro Electrónico |
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| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Norwich, N.Y. : Oxford :
William Andrew ; Elsevier Science [distributor],
2010.
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| Colección: | Micro & nano technologies.
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| Temas: | |
| Acceso en línea: | Texto completo |