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Characterization in silicon processing /
This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to disc...
| Clasificación: | Libro Electrónico |
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| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Boston : Greenwich :
Butterworth-Heinemann ; Manning,
©1993.
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| Colección: | Materials characterization series.
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| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to discuss typical problems seen throughout that films' history, including characterization tools which are most effectively used to clarifying and solving those problems. |
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| Descripción Física: | 1 online resource (xiii, 240 pages) : illustrations |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 1591245257 9781591245254 9780080523422 0080523420 |