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Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /

It is widely recognized that the successful design, development, and integration of multilevel metallization (MLM) systems is and will continue to be key to current and future VLSI technologies. All major semiconductor companies have significant ongoing research teams focused in this area. These tea...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Wilson, Syd R., Tracy, Clarence J., Freeman, John L.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Park Ridge, N.J. : Noyes Publications, ©1993.
Colección:Materials science and process technology series. Electronic materials and process technology.
Temas:
Acceso en línea:Texto completo