Nanoscale standards by metrological AFM and other instruments /

The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introd...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Misumi, Ichiko (Autor)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Bristol [England] (Temple Circus, Temple Way, Bristol BS1 6HG, UK) : IOP Publishing, [2021]
Colección:IOP (Series). Release 21.
IOP ebooks. 2021 collection.
Temas:
Nanotechnology > Measurement.
Scientific standards.
TECHNOLOGY & ENGINEERING / Measurement.
Acceso en línea:Texto completo
Tabla de Contenidos:
  • 1. Nano dimensional standards
  • 1.1. Nano dimensional standards
  • 1.2. Metrological atomic force microscopes
  • 1.3. The guide to the expression of uncertainty in measurement (The GUM, ISO/IEC Guide 98-3:2008)
  • 1.4. Summary
  • 2. One-dimensional grating
  • 2.1. Importance of one-dimensional grating as a nano dimensional standard
  • 2.2. Pitch calibration of one-dimensional grating by metrological AFMs
  • 2.3. Pitch calibration of one-dimensional grating by optical diffractometers
  • 2.4. Summary
  • 3. Step height
  • 3.1. Definition of step height
  • 3.2. Step height measurement based on ISO 543-1 by metrological AFM
  • 3.3. Range of reliability of measurement data
  • 3.4. Atomic step
  • 3.5. Summary
  • 4. Two-dimensional grating
  • 4.1. Two-dimensional grating
  • 4.2. Pitch calibration of two-dimensional grating by a metrological AFM
  • 4.3. Summary
  • 5. Line width
  • 5.1. Critical dimension atomic force microscope (CD-AFM)
  • 5.2. Metrological AFM with a tip-tilting mechanism
  • 5.3. CD standard sample
  • 5.4. Summary
  • 6. Nano particle size
  • 6.1. Definition and calculation method of nano particle size
  • 6.2. Nano particle size measurement using a metrological AFM
  • 6.3. Calculation of particle deformation
  • 6.4. Summary
  • 7. Surface roughness
  • 7.1. Introduction
  • 7.2. Measurement conditions
  • 7.3. Measurement results and discussion
  • 7.4. Summary
  • 8. Secondary realization of the SI meter using silicon lattice parameters
  • 8.1. The status of nano dimensional standards
  • 8.2. Secondary realization of the SI meter using silicon lattice parameters
  • 8.3. Future directions of nano dimensional standards
  • 8.4. Summary.

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