Cargando…
Nanoscale standards by metrological AFM and other instruments /
The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introd...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Bristol [England] (Temple Circus, Temple Way, Bristol BS1 6HG, UK) :
IOP Publishing,
[2021]
|
| Colección: | IOP (Series). Release 21.
IOP ebooks. 2021 collection. |
| Temas: | |
| Acceso en línea: | Texto completo |