Cargando…
Nanoscale standards by metrological AFM and other instruments /
The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introd...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Bristol [England] (Temple Circus, Temple Way, Bristol BS1 6HG, UK) :
IOP Publishing,
[2021]
|
| Colección: | IOP (Series). Release 21.
IOP ebooks. 2021 collection. |
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000nam a2200000 i 4500 | ||
|---|---|---|---|
| 001 | IOP_9780750331913 | ||
| 003 | IOP | ||
| 005 | 20210611101458.0 | ||
| 006 | m eo d | ||
| 007 | cr cn |||m|||a | ||
| 008 | 210611s2021 enka fob 000 0 eng d | ||
| 020 | |a 9780750331913 |q ebook | ||
| 020 | |a 9780750331906 |q mobi | ||
| 020 | |z 9780750331890 |q print | ||
| 020 | |z 9780750331920 |q myPrint | ||
| 024 | 7 | |a 10.1088/978-0-7503-3191-3 |2 doi | |
| 035 | |a (CaBNVSL)thg00082505 | ||
| 035 | |a (OCoLC)1259500972 | ||
| 040 | |a CaBNVSL |b eng |e rda |c CaBNVSL |d CaBNVSL | ||
| 050 | 4 | |a T174.7 |b .M576 2021eb | |
| 072 | 7 | |a PDD |2 bicssc | |
| 072 | 7 | |a TEC022000 |2 bisacsh | |
| 082 | 0 | 4 | |a 620.5 |2 23 |
| 100 | 1 | |a Misumi, Ichiko, |e author. | |
| 245 | 1 | 0 | |a Nanoscale standards by metrological AFM and other instruments / |c Ichiko Misumi. |
| 264 | 1 | |a Bristol [England] (Temple Circus, Temple Way, Bristol BS1 6HG, UK) : |b IOP Publishing, |c [2021] | |
| 300 | |a 1 online resource (various pagings) : |b illustrations (some color). | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a electronic |2 isbdmedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 490 | 1 | |a [IOP release $release] | |
| 490 | 1 | |a IOP ebooks. [2021 collection] | |
| 500 | |a "Version: 20210205"--Title page verso. | ||
| 504 | |a Includes bibliographical references. | ||
| 505 | 0 | |a 1. Nano dimensional standards -- 1.1. Nano dimensional standards -- 1.2. Metrological atomic force microscopes -- 1.3. The guide to the expression of uncertainty in measurement (The GUM, ISO/IEC Guide 98-3:2008) -- 1.4. Summary | |
| 505 | 8 | |a 2. One-dimensional grating -- 2.1. Importance of one-dimensional grating as a nano dimensional standard -- 2.2. Pitch calibration of one-dimensional grating by metrological AFMs -- 2.3. Pitch calibration of one-dimensional grating by optical diffractometers -- 2.4. Summary | |
| 505 | 8 | |a 3. Step height -- 3.1. Definition of step height -- 3.2. Step height measurement based on ISO 543-1 by metrological AFM -- 3.3. Range of reliability of measurement data -- 3.4. Atomic step -- 3.5. Summary | |
| 505 | 8 | |a 4. Two-dimensional grating -- 4.1. Two-dimensional grating -- 4.2. Pitch calibration of two-dimensional grating by a metrological AFM -- 4.3. Summary | |
| 505 | 8 | |a 5. Line width -- 5.1. Critical dimension atomic force microscope (CD-AFM) -- 5.2. Metrological AFM with a tip-tilting mechanism -- 5.3. CD standard sample -- 5.4. Summary | |
| 505 | 8 | |a 6. Nano particle size -- 6.1. Definition and calculation method of nano particle size -- 6.2. Nano particle size measurement using a metrological AFM -- 6.3. Calculation of particle deformation -- 6.4. Summary | |
| 505 | 8 | |a 7. Surface roughness -- 7.1. Introduction -- 7.2. Measurement conditions -- 7.3. Measurement results and discussion -- 7.4. Summary | |
| 505 | 8 | |a 8. Secondary realization of the SI meter using silicon lattice parameters -- 8.1. The status of nano dimensional standards -- 8.2. Secondary realization of the SI meter using silicon lattice parameters -- 8.3. Future directions of nano dimensional standards -- 8.4. Summary. | |
| 520 | 3 | |a The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introductory overview of nanometrological standards before proceeding to detail pitch standard, step height, line width, nano particle size, and surface roughness. This book is essential for users making quantitative nanoscale measurements, be that in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications. Here the author provides an approachable understanding and application of the nanoscale standards in a practical context across a range of common nanoscale measurement modalities, including 3D, with particular emphasis on applications to AFM, an exceptional and arguably the most common technique used in nanometrology due to the ease of use and versatility of applications. | |
| 521 | |a Nano-metrologists. AFM users in academia and industry. | ||
| 530 | |a Also available in print. | ||
| 538 | |a Mode of access: World Wide Web. | ||
| 538 | |a System requirements: Adobe Acrobat Reader, EPUB reader, or Kindle reader. | ||
| 545 | |a Dr. Misumi graduated with a degree in precision machinery engineering, from the University of Tokyo in 1996 and obtained her Doctor of Engineering from the University of Tokyo in 2004. She joined the National Research Laboratory of Metrology (NRLM) in 2000. In 2001, NRLM was renamed the National Metrology Institute of Japan (NMIJ). She received 'Outstanding Precision Measurement Paper Award 2005' from Measurement Science and Technology, Institute of Physics (IOP), and 'Highly Commended Paper Award 2007', again from Measurement Science and Technology, Institute of Physics (IOP). She also received 'Award for Science and Technology (Development Category), The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology' in 2011. | ||
| 588 | 0 | |a Title from PDF title page (viewed on June 11, 2021). | |
| 650 | 0 | |a Nanotechnology |x Measurement. | |
| 650 | 7 | |a Scientific standards. |2 bicssc | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Measurement. |2 bisacsh | |
| 710 | 2 | |a Institute of Physics (Great Britain), |e publisher. | |
| 776 | 0 | 8 | |i Print version: |z 9780750331890 |z 9780750331920 |
| 830 | 0 | |a IOP (Series). |p Release 21. | |
| 830 | 0 | |a IOP ebooks. |p 2021 collection. | |
| 856 | 4 | 0 | |u https://iopscience.uam.elogim.com/book/978-0-7503-3191-3 |z Texto completo |