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Spectroscopic ellipsometry : practical application to thin film characterization /

Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from subnanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced i...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Tompkins, Harland G. (Autor), Hilfiker, James N. (Autor)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York [New York] (222 East 46th Street, New York, NY 10017) : Momentum Press, 2016.
Colección:Materials characterization and analysis collection,
Temas:
Acceso en línea:Texto completo