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Secondary ion mass spectrometry : applications for depth profiling and surface characterization /

Secondary ion mass spectrometry (SIMS) is a mass spectrometric technique for solid materials that can provide elemental analysis at parts per million sensitivity and lateral resolution of 50 nm. When those capabilities are combined with the ability to provide that analysis as a function of depth, SI...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Stevie, F. A. (Autor)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York [New York] (222 East 46th Street, New York, NY 10017) : Momentum Press, 2016.
Colección:Materials characterization and analysis collection.
Temas:
Acceso en línea:Texto completo
Descripción
Sumario:Secondary ion mass spectrometry (SIMS) is a mass spectrometric technique for solid materials that can provide elemental analysis at parts per million sensitivity and lateral resolution of 50 nm. When those capabilities are combined with the ability to provide that analysis as a function of depth, SIMS has proved to be a valued technique for a wide range of applications. This book was written to explain a technique that requires an understanding of many details in order to properly obtain and interpret the data. It also will serve as a reference for those who need to provide SIMS data. The book has over 200 figures and the references allow one to trace the development of SIMS and help understand the technique.
Notas:Appendix -- Index.
Title from PDF title page (viewed on December 9, 2015).
Descripción Física:1 online resource (1 PDF (xx, 262 pages)) : illustrations
Bibliografía:Includes bibliographical references and index.
ISBN:9781606505892
1606505890
ISSN:2377-4355