Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium /
This volume covers various aspects of ultra-clean technology for the large-scale integration of semiconductors. These include cleaning and contamination control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing, as well as cleaning for semiconductor photo-voltaic applications....
Clasificación: | Libro Electrónico |
---|---|
Autor Corporativo: | |
Otros Autores: | , , |
Formato: | Electrónico Congresos, conferencias eBook |
Idioma: | Inglés |
Publicado: |
Durnten-Zurich, Switzerland :
Trans Tech Publications Ltd.,
[2013]
|
Colección: | Diffusion and defect data. Solid state phenomena ;
v. 195. |
Temas: | |
Acceso en línea: | Texto completo |