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Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium /

This volume covers various aspects of ultra-clean technology for the large-scale integration of semiconductors. These include cleaning and contamination control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing, as well as cleaning for semiconductor photo-voltaic applications....

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: International Symposium on Ultra Clean Processing of Semiconductor Surfaces Ghent, Belgium
Otros Autores: Heyns, Marc, Mertens, Paul, Meuris, Marc
Formato: Electrónico Congresos, conferencias eBook
Idioma:Inglés
Publicado: Durnten-Zurich, Switzerland : Trans Tech Publications Ltd., [2013]
Colección:Diffusion and defect data. Solid state phenomena ; v. 195.
Temas:
Acceso en línea:Texto completo