Advanced high Tc ferroelectrics /
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. Electromechanical actuators directly transform input electrical energy into mechanical energy. Piezoelectric and e...
Clasificación: | Libro Electrónico |
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Autor principal: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
New York :
Nova Publishers,
[2013]
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Colección: | Physics research and technology.
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Temas: | |
Acceso en línea: | Texto completo |