Rapid thermal processing for future semiconductor devices : proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001 /
This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokk...
Clasificación: | Libro Electrónico |
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Formato: | Electrónico Congresos, conferencias eBook |
Idioma: | Inglés |
Publicado: |
Amsterdam ; London :
Elsevier,
2003.
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Acceso en línea: | Texto completo |