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Analysis and design principles of MEMS devices /

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS dev...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Bao, Min-Hang
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Amsterdam ; Boston ; London : Elsevier, 2005.
Temas:
Acceso en línea:Texto completo