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Resonant MEMS : Fundamentals, Implementation, and Application.
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of thei...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Otros Autores: | , , , , , , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Hoboken :
Wiley,
2015.
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| Colección: | Advanced Micro and Nanosystems.
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| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid p. |
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| Notas: | 5.1.1 Mathematical Fundamentals. |
| Descripción Física: | 1 online resource (512 pages) |
| Bibliografía: | Includes bibliographical references at the end of each chapters and index. |
| ISBN: | 9783527676354 352767635X 9783527676361 3527676368 3527335455 9783527335459 |