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Resonant MEMS : Fundamentals, Implementation, and Application.
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of thei...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Otros Autores: | , , , , , , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Hoboken :
Wiley,
2015.
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| Colección: | Advanced Micro and Nanosystems.
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| Temas: | |
| Acceso en línea: | Texto completo |