Lithography /
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...
Clasificación: | Libro Electrónico |
---|---|
Otros Autores: | Landis, Stefan |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
London :
Wiley,
2013.
|
Colección: | ISTE.
|
Temas: | |
Acceso en línea: | Texto completo |
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