Adhesion aspects in MEMS-NEMS /

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Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS d...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Kim, Seong H., Dugger, M. T. (Michael T.), Mittal, K. L., 1945-
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Leiden ; Boston : Vsp, ©2010.
Temas:
Microelectromechanical systems.
Nanoelectromechanical systems.
Adhesion.
Surfaces (Technology)
Micro-Electrical-Mechanical Systems
Adhesiveness
Microsystèmes électromécaniques.
Nanosystèmes électromécaniques.
Adhésion (Physique)
Surfaces (Technologie)
adhesion.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
Adhesion
Microelectromechanical systems
Nanoelectromechanical systems
Acceso en línea:Texto completo
Descripción
Sumario:Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface.
Descripción Física:1 online resource (xi, 409 pages) : illustrations
Bibliografía:Includes bibliographical references.
ISBN:9004190953
9789004190955
9781615839476
161583947X

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