Adhesion aspects in MEMS-NEMS /

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Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS d...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Kim, Seong H., Dugger, M. T. (Michael T.), Mittal, K. L., 1945-
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Leiden ; Boston : Vsp, ©2010.
Temas:
Microelectromechanical systems.
Nanoelectromechanical systems.
Adhesion.
Surfaces (Technology)
Micro-Electrical-Mechanical Systems
Adhesiveness
Microsystèmes électromécaniques.
Nanosystèmes électromécaniques.
Adhésion (Physique)
Surfaces (Technologie)
adhesion.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
Adhesion
Microelectromechanical systems
Nanoelectromechanical systems
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