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Introduction to microfabrication /
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer prob...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Chichester, West Sussex, England ; Hoboken, NJ :
John Wiley & Sons,
2010.
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| Edición: | 2nd ed. |
| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Micrometrology and Materials Characterization
- Simulation of Microfabrication Processes
- Silicon
- Thin-Film Materials and Processes
- Epitaxy
- Advanced Thin Films
- Pattern Generation
- Optical Lithography
- Advanced Lithography
- Etching
- Wafer Cleaning and Surface Preparation
- Thermal Oxidation
- Diffusion
- Ion Implantation
- CMP: Chemical₆Mechanical Polishing
- Bonding
- Polymer Microprocessing
- Glass Microprocessing
- Anisotropic Wet Etching
- Deep Reactive Ion Etching
- Wafer Engineering
- Special Processes and Materials
- Serial Microprocessing
- Process Integration
- MOS Transistor Fabrication
- Bipolar Transistors
- Multilevel Metallization
- Surface Micromachining
- MEMS Process Integration
- Process Equipment
- Equipment for Hot Processes
- Vacuum and Plasmas
- CVD and Epitaxy Equipment
- Cleanrooms
- Yield and Reliability
- Economics of Microfabrication
- Moore's Law and Scaling Trends
- Microfabrication at Large
- Appendix A: Properties of Silicon
- Appendix B: Constants and Conversion Factors
- Appendix C: Oxide and Nitride Thickness by Color.