Introduction to microfabrication /

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer prob...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Franssila, Sami
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.
Edición:2nd ed.
Temas:
Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.
Micro-Electrical-Mechanical Systems
Microsystèmes électromécaniques.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
Electronic apparatus and appliances
Microelectromechanical systems
Microfabrication
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