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Introduction to microfabrication /
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer prob...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Chichester, West Sussex, England ; Hoboken, NJ :
John Wiley & Sons,
2010.
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| Edición: | 2nd ed. |
| Temas: | |
| Acceso en línea: | Texto completo |