Handbook of physical vapor deposition (PVD) processing /
This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the ne...
Clasificación: | Libro Electrónico |
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Autor principal: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Norwich, N.Y. : Oxford :
William Andrew ; Elsevier Science [distributor],
©2010.
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Edición: | 2nd ed. |
Temas: | |
Acceso en línea: | Texto completo |