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Poly-SiGe for MEMS-above-CMOS Sensors
Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead...
| Clasificación: | Libro Electrónico |
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| Autores principales: | , , |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Dordrecht :
Springer Netherlands : Imprint: Springer,
2014.
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| Edición: | 1st ed. 2014. |
| Colección: | Springer Series in Advanced Microelectronics,
44 |
| Temas: | |
| Acceso en línea: | Texto Completo |