Poly-SiGe for MEMS-above-CMOS Sensors

Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Gonzalez Ruiz, Pilar (Autor), De Meyer, Kristin (Autor), Witvrouw, Ann (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Dordrecht : Springer Netherlands : Imprint: Springer, 2014.
Edición:1st ed. 2014.
Colección:Springer Series in Advanced Microelectronics, 44
Temas:
Electronic circuits.
Optical materials.
Microtechnology.
Microelectromechanical systems.
Materials-Analysis.
Electronic Circuits and Systems.
Optical Materials.
Microsystems and MEMS.
Characterization and Analytical Technique.
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