Cargando…
Temperature Measurement during Millisecond Annealing Ripple Pyrometry for Flash Lamp Annealers /
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal an...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Wiesbaden :
Springer Fachmedien Wiesbaden : Imprint: Springer,
2015.
|
| Edición: | 1st ed. 2015. |
| Colección: | MatWerk,
|
| Temas: | |
| Acceso en línea: | Texto Completo |
Tabla de Contenidos:
- Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing
- Concept of ripple pyrometry during flash lamp annealing
- Ripple pyrometry for flash lamp annealing.- Experiments - ripple pyrometry during flash lamp annealing.- Closing discussion and outlook.