Temperature Measurement during Millisecond Annealing Ripple Pyrometry for Flash Lamp Annealers /
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal an...
Clasificación: | Libro Electrónico |
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Autor principal: | |
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Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Wiesbaden :
Springer Fachmedien Wiesbaden : Imprint: Springer,
2015.
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Edición: | 1st ed. 2015. |
Colección: | MatWerk,
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Acceso en línea: | Texto Completo |