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Temperature Measurement during Millisecond Annealing Ripple Pyrometry for Flash Lamp Annealers /

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal an...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Reichel, Denise (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Wiesbaden : Springer Fachmedien Wiesbaden : Imprint: Springer, 2015.
Edición:1st ed. 2015.
Colección:MatWerk,
Temas:
Acceso en línea:Texto Completo

MARC

LEADER 00000nam a22000005i 4500
001 978-3-658-11388-9
003 DE-He213
005 20220118202139.0
007 cr nn 008mamaa
008 160107s2015 gw | s |||| 0|eng d
020 |a 9783658113889  |9 978-3-658-11388-9 
024 7 |a 10.1007/978-3-658-11388-9  |2 doi 
050 4 |a QC173.45-173.458 
072 7 |a PHFC  |2 bicssc 
072 7 |a SCI077000  |2 bisacsh 
072 7 |a PHFC  |2 thema 
082 0 4 |a 530.41  |2 23 
100 1 |a Reichel, Denise.  |e author.  |4 aut  |4 http://id.loc.gov/vocabulary/relators/aut 
245 1 0 |a Temperature Measurement during Millisecond Annealing  |h [electronic resource] :  |b Ripple Pyrometry for Flash Lamp Annealers /  |c by Denise Reichel. 
250 |a 1st ed. 2015. 
264 1 |a Wiesbaden :  |b Springer Fachmedien Wiesbaden :  |b Imprint: Springer,  |c 2015. 
300 |a XXV, 112 p. 77 illus. in color.  |b online resource. 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
347 |a text file  |b PDF  |2 rda 
490 1 |a MatWerk,  |x 2522-0764 
505 0 |a Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing -- Concept of ripple pyrometry during  flash lamp annealing --  Ripple pyrometry for flash lamp annealing.- Experiments - ripple pyrometry during flash lamp annealing.- Closing discussion and outlook. 
520 |a Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures. Contents Fundamentals of flash lamp annealing of shallow Boron-doped Silicon Fundamentals of surface temperature measurements during flash lamp annealing Concept of ripple pyrometry during flash lamp annealing      Ripple pyrometry for flash lamp annealing - Experiments Target Groups ·Researchers and students from the fields of materials sciences and physics ·Practitioners from microelectronics and photovoltaics industry About the Author Dr. Denise Reichel currently works in technical sales and consulting for temperature  measurement needs and as a lecturer for thermodynamics and heat and mass transfer.  . 
650 0 |a Condensed matter. 
650 0 |a Thermodynamics. 
650 0 |a Materials. 
650 1 4 |a Condensed Matter Physics. 
650 2 4 |a Thermodynamics. 
650 2 4 |a Materials Engineering. 
710 2 |a SpringerLink (Online service) 
773 0 |t Springer Nature eBook 
776 0 8 |i Printed edition:  |z 9783658113872 
830 0 |a MatWerk,  |x 2522-0764 
856 4 0 |u https://doi.uam.elogim.com/10.1007/978-3-658-11388-9  |z Texto Completo 
912 |a ZDB-2-SBL 
912 |a ZDB-2-SXB 
950 |a Biomedical and Life Sciences (SpringerNature-11642) 
950 |a Biomedical and Life Sciences (R0) (SpringerNature-43708)