Cargando…

Multilayer Integrated Film Bulk Acoustic Resonators

Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated...

Descripción completa

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Zhang, Yafei (Autor), Chen, Da (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
Edición:1st ed. 2013.
Temas:
Acceso en línea:Texto Completo

MARC

LEADER 00000nam a22000005i 4500
001 978-3-642-31776-7
003 DE-He213
005 20220114200016.0
007 cr nn 008mamaa
008 120827s2013 gw | s |||| 0|eng d
020 |a 9783642317767  |9 978-3-642-31776-7 
024 7 |a 10.1007/978-3-642-31776-7  |2 doi 
050 4 |a TK7875 
072 7 |a TJF  |2 bicssc 
072 7 |a TEC027000  |2 bisacsh 
072 7 |a TJF  |2 thema 
082 0 4 |a 621.381  |2 23 
100 1 |a Zhang, Yafei.  |e author.  |4 aut  |4 http://id.loc.gov/vocabulary/relators/aut 
245 1 0 |a Multilayer Integrated Film Bulk Acoustic Resonators  |h [electronic resource] /  |c by Yafei Zhang, Da Chen. 
250 |a 1st ed. 2013. 
264 1 |a Berlin, Heidelberg :  |b Springer Berlin Heidelberg :  |b Imprint: Springer,  |c 2013. 
300 |a X, 154 p.  |b online resource. 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
347 |a text file  |b PDF  |2 rda 
505 0 |a Introduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR. 
520 |a Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education's Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang's research group. 
650 0 |a Microtechnology. 
650 0 |a Microelectromechanical systems. 
650 0 |a Surfaces (Technology). 
650 0 |a Thin films. 
650 0 |a Condensed matter. 
650 1 4 |a Microsystems and MEMS. 
650 2 4 |a Surfaces, Interfaces and Thin Film. 
650 2 4 |a Condensed Matter Physics. 
700 1 |a Chen, Da.  |e author.  |4 aut  |4 http://id.loc.gov/vocabulary/relators/aut 
710 2 |a SpringerLink (Online service) 
773 0 |t Springer Nature eBook 
776 0 8 |i Printed edition:  |z 9783642317774 
776 0 8 |i Printed edition:  |z 9783642427558 
776 0 8 |i Printed edition:  |z 9783642317750 
856 4 0 |u https://doi.uam.elogim.com/10.1007/978-3-642-31776-7  |z Texto Completo 
912 |a ZDB-2-ENG 
912 |a ZDB-2-SXE 
950 |a Engineering (SpringerNature-11647) 
950 |a Engineering (R0) (SpringerNature-43712)