Multilayer Integrated Film Bulk Acoustic Resonators

Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Zhang, Yafei (Autor), Chen, Da (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
Edición:1st ed. 2013.
Temas:
Microtechnology.
Microelectromechanical systems.
Surfaces (Technology).
Thin films.
Condensed matter.
Microsystems and MEMS.
Surfaces, Interfaces and Thin Film.
Condensed Matter Physics.
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