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Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing /
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
London :
Springer London : Imprint: Springer,
2010.
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| Edición: | 1st ed. 2010. |
| Colección: | Springer Series in Advanced Manufacturing,
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| Temas: | |
| Acceso en línea: | Texto Completo |