Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing /

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Gao, Wei (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: London : Springer London : Imprint: Springer, 2010.
Edición:1st ed. 2010.
Colección:Springer Series in Advanced Manufacturing,
Temas:
Microtechnology.
Microelectromechanical systems.
Surfaces (Physics).
Control engineering.
Robotics.
Automation.
Manufactures.
Measurement.
Measuring instruments.
Nanotechnology.
Microsystems and MEMS.
Surface and Interface and Thin Film.
Control, Robotics, Automation.
Machines, Tools, Processes.
Measurement Science and Instrumentation.
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