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Precision Motion Control Design and Implementation /
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g.,...
| Clasificación: | Libro Electrónico |
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| Autores principales: | , , |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
London :
Springer London : Imprint: Springer,
2008.
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| Edición: | 2nd ed. 2008. |
| Colección: | Advances in Industrial Control,
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| Temas: | |
| Acceso en línea: | Texto Completo |