Precision Motion Control Design and Implementation /

Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g.,...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Tan, Kok Kiong (Autor), Lee, Tong Heng (Autor), Huang, Sunan (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: London : Springer London : Imprint: Springer, 2008.
Edición:2nd ed. 2008.
Colección:Advances in Industrial Control,
Temas:
Control engineering.
Nanotechnology.
Manufactures.
Robotics.
Automation.
Multibody systems.
Vibration.
Mechanics, Applied.
Electronics.
Control and Systems Theory.
Machines, Tools, Processes.
Control, Robotics, Automation.
Multibody Systems and Mechanical Vibrations.
Electronics and Microelectronics, Instrumentation.
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