Design for Manufacturability and Yield for Nano-Scale CMOS
As we approach the 32 nm CMOS technology node the design and manufacturing communities are dealing with a lithography system that has to print circuit artifacts that are significantly less than half the wavelength of the light source used, with new materials, with tighter pitches, and higher aspect...
Clasificación: | Libro Electrónico |
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Autores principales: | , |
Autor Corporativo: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Dordrecht :
Springer Netherlands : Imprint: Springer,
2007.
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Edición: | 1st ed. 2007. |
Colección: | Integrated Circuits and Systems,
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Temas: | |
Acceso en línea: | Texto Completo |