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Control and Optimization of Multiscale Process Systems

Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly couple...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Christofides, Panagiotis D. (Autor), Armaou, Antonios (Autor), Lou, Yiming (Autor), Varshney, Amit (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Boston, MA : Birkhäuser Boston : Imprint: Birkhäuser, 2009.
Edición:1st ed. 2009.
Colección:Control Engineering,
Temas:
Acceso en línea:Texto Completo