Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications

Advanced Nanoscale ULSI Interconnects: Fundamental and Applications brings a comprehensive description of copper based interconnect technology for Ultra Large Scale Integration (ULSI) technology to Integrated Circuit (ICs) application. This book reviews the basic technologies used today for the copp...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: SpringerLink (Online service)
Otros Autores: Shacham-Diamand, Yosi (Editor ), Osaka, Tetsuya (Editor ), Datta, Madhav (Editor ), Ohba, Takayuki (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer New York : Imprint: Springer, 2009.
Edición:1st ed. 2009.
Temas:
Electrochemistry.
Materials science.
Chemistry, Technical.
Electrical engineering.
Nanotechnology.
Materials Science.
Industrial Chemistry.
Electrical and Electronic Engineering.
Acceso en línea:Texto Completo

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