MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: SpringerLink (Online service)
Otros Autores: Ghodssi, Reza (Editor ), Lin, Pinyen (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer US : Imprint: Springer, 2011.
Edición:1st ed. 2011.
Colección:MEMS Reference Shelf, 1
Temas:
Electronics.
Materials science.
Electronic circuits.
Surfaces (Technology).
Thin films.
Electronics and Microelectronics, Instrumentation.
Materials Science.
Electronic Circuits and Systems.
Surfaces, Interfaces and Thin Film.
Acceso en línea:Texto Completo
Descripción
Sumario:MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the required task at hand. The 'Processes' section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs. The book also: Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS Discusses specific MEMS fabrication techniques such as additive, subtractive, and lithography/patterning, as well as wafer bonding, doping, surface treatment/preparation, and characterization techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication MEMS Material and Processes Handbook will be a valuable book for researchers, engineers and students working in MEMS and materials processing.           .
Descripción Física:XXXVI, 1188 p. 200 illus. online resource.
ISBN:9780387473185
ISSN:1936-4415 ;

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