MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: SpringerLink (Online service)
Otros Autores: Ghodssi, Reza (Editor ), Lin, Pinyen (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, NY : Springer US : Imprint: Springer, 2011.
Edición:1st ed. 2011.
Colección:MEMS Reference Shelf, 1
Temas:
Electronics.
Materials science.
Electronic circuits.
Surfaces (Technology).
Thin films.
Electronics and Microelectronics, Instrumentation.
Materials Science.
Electronic Circuits and Systems.
Surfaces, Interfaces and Thin Film.
Acceso en línea:Texto Completo

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