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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integ...
| Clasificación: | Libro Electrónico |
|---|---|
| Autores principales: | , , |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
New York, NY :
Springer US : Imprint: Springer,
2006.
|
| Edición: | 1st ed. 2006. |
| Temas: | |
| Acceso en línea: | Texto Completo |
Tabla de Contenidos:
- Introduction: Context and motivations
- Introduction: Context and motivations
- Techniques and materials
- Silicon bulk micromachining with TMAH
- Thin dielectric films stress extraction
- Microsensors
- Low power microhotplate as basic cell
- Microheater based flow sensor
- Gas Sensors on microhotplate
- SOI-CMOS compatibility validation
- Conclusions and outlook
- Conclusions and outlook.