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Laser annealing processes in semiconductor technology : theory, modeling and applications in nanoelectronics /
Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of...
| Clasificación: | Libro Electrónico |
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| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Oxford :
Woodhead Publishing,
2021.
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| Colección: | Woodhead Publishing series in electronic and optical materials.
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| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering. |
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| Descripción Física: | 1 online resource (1 volume) : illustrations (black and white, and colour). |
| ISBN: | 9780128202555 0128202556 0128202564 9780128202562 |