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Handbook of silicon based mems materials and technologies /

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Bibliographic Details
Call Number:	Libro Electrónico
Other Authors:	Tilli, Markku (Editor)
Format:	Electronic eBook
Language:	Inglés
Published:	Amsterdam : Elsevier, 2020.
Edition:	Third edition.
Series:	Micro & nano technologies.
Subjects:	Microelectromechanical systems. Silicon. Micro-Electrical-Mechanical Systems Silicon Microsyst�emes �electrom�ecaniques. Silicium. silicon. Microelectromechanical systems
Online Access:	Texto completo

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