Cita APA (7a ed.)

Tilli, M. (2020). Handbook of silicon based mems materials and technologies (Third edition.). Elsevier.

Cita Chicago Style (17a ed.)

Tilli, Markku. Handbook of Silicon Based Mems Materials and Technologies. Third edition. Amsterdam: Elsevier, 2020.

Cita MLA (8a ed.)

Tilli, Markku. Handbook of Silicon Based Mems Materials and Technologies. Third edition. Elsevier, 2020.