Posseme, N. (2017). Plasma etching processes for CMOS device realization. ISTE Press ; Elsevier.
Cita Chicago Style (17a ed.)Posseme, Nicolas. Plasma Etching Processes for CMOS Device Realization. London, UK : Kidlington, Oxford, UK: ISTE Press ; Elsevier, 2017.
Cita MLA (8a ed.)Posseme, Nicolas. Plasma Etching Processes for CMOS Device Realization. ISTE Press ; Elsevier, 2017.
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