Plasma processing for VLSI /

Plasma Processing for VLSI.

Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Einspruch, Norman G., Brown, Dale M.
Format: Electronic eBook
Language:Inglés
Published: New York : Academic Press, 1984.
Series:VLSI electronics ; v. 8.
Subjects:
Integrated circuits > Very large scale integration.
Plasma (Ionized gases) > Industrial applications.
Circuits int�egr�es �a tr�es grande �echelle.
Plasma (Gaz ionis�es) > Applications industrielles.
TECHNOLOGY & ENGINEERING > Mechanical.
Integrated circuits > Very large scale integration
Plasma (Ionized gases) > Industrial applications
Gravure par plasma.
Lithographie par rayons X.
Pulv�erisation cathodique.
Online Access:Texto completo
Texto completo

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