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Plasma processing for VLSI /

Plasma Processing for VLSI.

Bibliographic Details
Call Number:	Libro Electrónico
Other Authors:	Einspruch, Norman G., Brown, Dale M.
Format:	Electronic eBook
Language:	Inglés
Published:	New York : Academic Press, 1984.
Series:	VLSI electronics ; v. 8.
Subjects:	Integrated circuits > Very large scale integration. Plasma (Ionized gases) > Industrial applications. Circuits int�egr�es �a tr�es grande �echelle. Plasma (Gaz ionis�es) > Applications industrielles. TECHNOLOGY & ENGINEERING > Mechanical. Integrated circuits > Very large scale integration Plasma (Ionized gases) > Industrial applications Gravure par plasma. Lithographie par rayons X. Pulv�erisation cathodique.
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