Cita APA (7a ed.)

Einspruch, N. G., & Brown, D. M. (1984). Plasma processing for VLSI. Academic Press.

Cita Chicago Style (17a ed.)

Einspruch, Norman G., y Dale M. Brown. Plasma Processing for VLSI. New York: Academic Press, 1984.

Cita MLA (8a ed.)

Einspruch, Norman G., y Dale M. Brown. Plasma Processing for VLSI. Academic Press, 1984.