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Applied solid state science. advances in materials and device research / Supplement 2, Silicon integrated circuits. Part C :

Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid iso...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Wolfe, Raymond (Editor), Kahng, Dawon (Editor)
Format: Electronic eBook
Language:Inglés
Published: Orlando ; London : Academic, 1985.
Series:Applied solid state science. Supplement ; 2.
Subjects:
Online Access:Texto completo