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Applied solid state science. advances in materials and device research / Supplement 2, Silicon integrated circuits. Part C :

Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid iso...

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Détails bibliographiques
Cote:Libro Electrónico
Autres auteurs: Wolfe, Raymond (Éditeur intellectuel), Kahng, Dawon (Éditeur intellectuel)
Format: Électronique eBook
Langue:Inglés
Publié: Orlando ; London : Academic, 1985.
Collection:Applied solid state science. Supplement ; 2.
Sujets:
Accès en ligne:Texto completo

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