Applied solid state science. advances in materials and device research / Supplement 2, Silicon integrated circuits. Part C :
Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid iso...
Cote: | Libro Electrónico |
---|---|
Autres auteurs: | Wolfe, Raymond (Éditeur intellectuel), Kahng, Dawon (Éditeur intellectuel) |
Format: | Électronique eBook |
Langue: | Inglés |
Publié: |
Orlando ; London :
Academic,
1985.
|
Collection: | Applied solid state science. Supplement ;
2. |
Sujets: | |
Accès en ligne: | Texto completo |
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