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Nanolithography : the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems /
Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Emerging technologies are described, including the directed assembly of wafer features, nanostructures and devi...
| Call Number: | Libro Electrónico |
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| Other Authors: | |
| Format: | Electronic eBook |
| Language: | Inglés |
| Published: |
Oxford :
Woodhead Publishing,
2014.
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| Series: | Woodhead Publishing series in electronic and optical materials.
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| Subjects: | |
| Online Access: | Texto completo |