Organometallic vapor phase epitaxy : theory and practice /

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Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: Stringfellow, G. B. (Gerald B.), 1942-
Format: Electronic eBook
Language:Inglés
Published: Boston : Academic Press, �1989.
Subjects:
Compound semiconductors.
Metal organic chemical vapor deposition.
Epitaxy.
�Epitaxie.
Compos�es semi-conducteurs.
D�ep�ot en phase vapeur par organom�etalliques.
Epitaxy
Compound semiconductors
Metal organic chemical vapor deposition
Metallorganische Verbindungen
Gasphasenepitaxie
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