Ion beam modification of materials : proceedings of the ninth International Conference on Ion Beam Modification of Materials, Canberra, Australia, 5-10 February, 1995 /

Bibliographic Details
Call Number:Libro Electrónico
Corporate Author: International Conference on Ion Beam Modification of Materials Canberra, A.C.T.
Other Authors: Williams, James S. (James Stanislaus), 1948-, Elliman, R. G. (Rob G.), Ridgway, M. C. (Mark C.)
Format: Electronic Conference Proceeding eBook
Language:Inglés
Published: Amsterdam ; New York : Elsevier Science, 1996.
Subjects:
Materials > Effect of radiation on > Congresses.
Ion bombardment > Congresses.
Electronics > Materials > Effect of radiation on > Congresses.
Mat�eriaux > Effets du rayonnement sur > Congr�es.
Bombardement ionique > Congr�es.
�Electronique > Mat�eriaux > Effets du rayonnement sur > Congr�es.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
Electronics > Materials > Effect of radiation on
Ion bombardment
Materials > Effect of radiation on
Congress
proceedings (reports)
Conference papers and proceedings
Conference papers and proceedings.
Actes de congr�es.
Online Access:Texto completo
Table of Contents:
  • pt. I, section I. Basic processes ; section II. Low energy processes ; section III. Defect formation and annealing of semiconductors ; section IV. Semiconductor processing, devices and optical materials ; section V. Modification of non-semiconductor materials ; section VI. Novel processing : applications and techniques
  • pt. II, section A. Basic processes ; section B. Low-energy processes ; section C. Defect formation and annealing of semiconductors ; section D. Semiconductor processing, devices and optical materials ; section E. Modification of non-semiconductor materials ; section F. Novel processing : applications and techniques.

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